Title

Micro-Transformer Devices Using Thin-Film Electroplated Deposition

Document Type

Conference Proceeding

Publication Date

1-1-1998

Abstract

We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.

DOI

10.1109/PESC.1998.703269

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