Micro-Transformer Devices Using Thin-Film Electroplated Deposition
We report our results fabricating micro-magnetic devices using our 20 μm photolithographic process. In this technique, magnetic devices in silicon ICs use magnetic thin-films deposited by electroplating. The magnetic and electrical characteristics of fabricated micro-transformers are measured and reported. Tests show proper operation over high-voltage isolation boundaries. Future uses for these devices will be in micro-power converters for mobile applications.
MSU Digital Commons Citation
Lotfi, Ashraf; Van Dover, Robert B.; Schneemeyer, Lynn; and Steigerwald, Michael, "Micro-Transformer Devices Using Thin-Film Electroplated Deposition" (1998). Department of Chemistry and Biochemistry Faculty Scholarship and Creative Works. 511.